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    Product Features


    1. Suitable for ultra pure,flammable or toxic fluid lines in semiconductor
      manufacturing equipment and facilities
       Direct diaphragm construction with superior sealing
      prerformance,remarkable durability,compactness and particle and
      dead-space-free performance
      Valve open and closed opsition is easily visible at a glance.
       Excellent gas displacement characteristics
      EP treatment is standard for all wetted sufaces
      Standard seat material is PCTFE,Polyimide/PFA is option


    Technical Data


    • Max. Working Pressure 3000 psig (205 bar)
      Pneumatic Operating Pressure 58~87psig (4~6 bar)
      Max. Working Temp. -10?F ~ 150?F (-23?C ~ 65?C)
      Body 316L secondary remelt
      Diaphragm Elgiloy®
      Seat packing PCTFE(standard)
      Handle AL
      Internal Leakage Allowance(He) 1 x 10-9 atm • cc/sec
      External Leakage Allowance (He) 1 x 10-9 atm • cc/sec
      Orifice Ø5 mm
      Weight approx. 0.27 kg(actuator not included)

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